![正在蔡司半導體無塵室內工作的員工]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions.jpg/_jcr_content/renditions/original.image_file.100.100.155,180,1234,1259.file/sms-metrology_solutions.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions.jpg/_jcr_content/renditions/original.image_file.360.360.155,180,1234,1259.file/sms-metrology_solutions.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions.jpg/_jcr_content/renditions/original.image_file.768.768.155,180,1234,1259.file/sms-metrology_solutions.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions.jpg/_jcr_content/renditions/original.image_file.1024.1024.155,180,1234,1259.file/sms-metrology_solutions.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions.jpg/_jcr_content/renditions/original.image_file.1079.1079.155,180,1234,1259.file/sms-metrology_solutions.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions.jpg/_jcr_content/renditions/original.image_file.1079.1079.155,180,1234,1259.file/sms-metrology_solutions.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions.jpg/_jcr_content/renditions/original.image_file.1079.1079.155,180,1234,1259.file/sms-metrology_solutions.jpg"} "光罩量測解決方案－蔡司PROVE系統")
光罩量測解決方案
蔡司PROVE 可修正任何可測量的特徵。
圖像安放仍是光罩量測的重要層面。不僅單一光罩的特性位置精準度（代表一層完整晶片設計）必須符合嚴格的要求。所有層的完整光罩組也必須符合要求，才能使成品具備功能性。蔡司PROVE光罩對位和疊對量測系統以次奈米等級的重複性和精準度測量圖形定位，確保圖形位置的精準度。
![SMS Metrology Solutions - ZEISS PROVE systems]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.100.100.18,0,832,814.file/sms-metrology_solution_app1.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.360.360.18,0,832,814.file/sms-metrology_solution_app1.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.768.768.18,0,832,814.file/sms-metrology_solution_app1.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.814.814.18,0,832,814.file/sms-metrology_solution_app1.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.814.814.18,0,832,814.file/sms-metrology_solution_app1.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.814.814.18,0,832,814.file/sms-metrology_solution_app1.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.814.814.18,0,832,814.file/sms-metrology_solution_app1.jpg"} "SMS Metrology Solutions - ZEISS PROVE systems")
![SMS Metrology Solutions - ZEISS PROVE systems]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app2.jpg/_jcr_content/renditions/original.image_file.100.100.0,23,1090,1113.file/sms-metrology_solution_app2.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app2.jpg/_jcr_content/renditions/original.image_file.360.360.0,23,1090,1113.file/sms-metrology_solution_app2.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app2.jpg/_jcr_content/renditions/original.image_file.768.768.0,23,1090,1113.file/sms-metrology_solution_app2.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app2.jpg/_jcr_content/renditions/original.image_file.1024.1024.0,23,1090,1113.file/sms-metrology_solution_app2.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app2.jpg/_jcr_content/renditions/original.image_file.1090.1090.0,23,1090,1113.file/sms-metrology_solution_app2.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app2.jpg/_jcr_content/renditions/original.image_file.1090.1090.0,23,1090,1113.file/sms-metrology_solution_app2.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app2.jpg/_jcr_content/renditions/original.image_file.1090.1090.0,23,1090,1113.file/sms-metrology_solution_app2.jpg"} "SMS Metrology Solutions - ZEISS PROVE systems")
![SMS Metrology Solutions - ZEISS PROVE systems]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions_app3.jpg/_jcr_content/renditions/original.image_file.100.100.1,0,449,448.file/sms-metrology_solutions_app3.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions_app3.jpg/_jcr_content/renditions/original.image_file.360.360.1,0,449,448.file/sms-metrology_solutions_app3.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions_app3.jpg/_jcr_content/renditions/original.image_file.448.448.1,0,449,448.file/sms-metrology_solutions_app3.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions_app3.jpg/_jcr_content/renditions/original.image_file.448.448.1,0,449,448.file/sms-metrology_solutions_app3.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions_app3.jpg/_jcr_content/renditions/original.image_file.448.448.1,0,449,448.file/sms-metrology_solutions_app3.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions_app3.jpg/_jcr_content/renditions/original.image_file.448.448.1,0,449,448.file/sms-metrology_solutions_app3.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solutions_app3.jpg/_jcr_content/renditions/original.image_file.448.448.1,0,449,448.file/sms-metrology_solutions_app3.jpg"} "SMS Metrology Solutions - ZEISS PROVE systems")
![用於先進的對位和疊對量測的蔡司PROVE neXT]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-provenextgraphic.jpg/_jcr_content/renditions/original.image_file.100.75.0,6,1917,1445.file/sms-provenextgraphic.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-provenextgraphic.jpg/_jcr_content/renditions/original.image_file.360.270.0,6,1917,1445.file/sms-provenextgraphic.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-provenextgraphic.jpg/_jcr_content/renditions/original.image_file.768.576.0,6,1917,1445.file/sms-provenextgraphic.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-provenextgraphic.jpg/_jcr_content/renditions/original.image_file.1024.768.0,6,1917,1445.file/sms-provenextgraphic.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-provenextgraphic.jpg/_jcr_content/renditions/original.image_file.1280.960.0,6,1917,1445.file/sms-provenextgraphic.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-provenextgraphic.jpg/_jcr_content/renditions/original.image_file.1440.1080.0,6,1917,1445.file/sms-provenextgraphic.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-provenextgraphic.jpg/_jcr_content/renditions/original.image_file.1917.1438.0,6,1917,1445.file/sms-provenextgraphic.jpg"} "蔡司PROVE neXT")
![螢幕顯示半導體產品的蔡司軟體]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/stagecontainer.jpg/_jcr_content/renditions/original.image_file.100.75.0,0,1917,1439.file/stagecontainer.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/stagecontainer.jpg/_jcr_content/renditions/original.image_file.360.270.0,0,1917,1439.file/stagecontainer.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/stagecontainer.jpg/_jcr_content/renditions/original.image_file.768.576.0,0,1917,1439.file/stagecontainer.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/stagecontainer.jpg/_jcr_content/renditions/original.image_file.1024.768.0,0,1917,1439.file/stagecontainer.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/stagecontainer.jpg/_jcr_content/renditions/original.image_file.1280.960.0,0,1917,1439.file/stagecontainer.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/stagecontainer.jpg/_jcr_content/renditions/original.image_file.1440.1080.0,0,1917,1439.file/stagecontainer.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/stagecontainer.jpg/_jcr_content/renditions/original.image_file.1917.1438.0,0,1917,1439.file/stagecontainer.jpg"} "蔡司FAVOR®數位解決方案")
![具典型彩虹色澤的半導體光罩]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms_pattern-placement-metrology.jpg/_jcr_content/renditions/original.image_file.100.100.192,0,1472,1280.file/sms_pattern-placement-metrology.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms_pattern-placement-metrology.jpg/_jcr_content/renditions/original.image_file.360.360.192,0,1472,1280.file/sms_pattern-placement-metrology.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms_pattern-placement-metrology.jpg/_jcr_content/renditions/original.image_file.768.768.192,0,1472,1280.file/sms_pattern-placement-metrology.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms_pattern-placement-metrology.jpg/_jcr_content/renditions/original.image_file.1024.1024.192,0,1472,1280.file/sms_pattern-placement-metrology.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms_pattern-placement-metrology.jpg/_jcr_content/renditions/original.image_file.1280.1280.192,0,1472,1280.file/sms_pattern-placement-metrology.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms_pattern-placement-metrology.jpg/_jcr_content/renditions/original.image_file.1280.1280.192,0,1472,1280.file/sms_pattern-placement-metrology.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms_pattern-placement-metrology.jpg/_jcr_content/renditions/original.image_file.1280.1280.192,0,1472,1280.file/sms_pattern-placement-metrology.jpg"} "高精度圖形定位量測")
精準的圖形定位
以實現先進的微影技術多光束寫入工具的導入為因應逆向微影（ILT）和EUV微影所需的高度圖形複雜性開啟了新途徑，同時又不犧牲產出效能。現今的先進工具可實現光罩等級小於1奈米的圖形定位精準度。為達到此性能等級，這些工具必須仰賴低量測雜訊的對位工具，來進行校正和調整。
蔡司PROVE neXT專為滿足這些需求所設計，同時還具備無與倫比的重複性和高取樣率。
![光罩結構]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.100.100.33,0,1258,1225.file/sms-metrology_solution_app1.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.360.360.33,0,1258,1225.file/sms-metrology_solution_app1.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.768.768.33,0,1258,1225.file/sms-metrology_solution_app1.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.1024.1024.33,0,1258,1225.file/sms-metrology_solution_app1.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.1225.1225.33,0,1258,1225.file/sms-metrology_solution_app1.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.1225.1225.33,0,1258,1225.file/sms-metrology_solution_app1.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/sms-metrology_solution_app1.jpg/_jcr_content/renditions/original.image_file.1225.1225.33,0,1258,1225.file/sms-metrology_solution_app1.jpg"} "優異的光罩與晶圓對應性")
優異的光罩與晶圓對應性
滿足最嚴格的疊對規格領先的EUV和DUV微影設備供應商證實，蔡司PROVE提供優異的光罩與晶圓對應性，這對晶圓廠進一步優化疊對精準度至關重要。
![光罩的表面結構]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_mask-flatness_w.jpg/_jcr_content/renditions/original.image_file.100.100.14,0,724,710.file/prove_mask-flatness_w.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_mask-flatness_w.jpg/_jcr_content/renditions/original.image_file.360.360.14,0,724,710.file/prove_mask-flatness_w.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_mask-flatness_w.jpg/_jcr_content/renditions/original.image_file.710.710.14,0,724,710.file/prove_mask-flatness_w.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_mask-flatness_w.jpg/_jcr_content/renditions/original.image_file.710.710.14,0,724,710.file/prove_mask-flatness_w.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_mask-flatness_w.jpg/_jcr_content/renditions/original.image_file.710.710.14,0,724,710.file/prove_mask-flatness_w.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_mask-flatness_w.jpg/_jcr_content/renditions/original.image_file.710.710.14,0,724,710.file/prove_mask-flatness_w.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_mask-flatness_w.jpg/_jcr_content/renditions/original.image_file.710.710.14,0,724,710.file/prove_mask-flatness_w.jpg"} "光罩平整度的測量與評估")
實現EUV微影
光罩平整度的測量與評估蔡司PROVE透過高精度干涉儀技術控制空間中所有方向的量測，此外還能根據EUV微影需求，評估有圖案與無圖案光罩的平整度。該系統提供X、Y和Z三個方向的綜合對位資料，供晶圓廠進一步優化疊對精準度。
![定位EUV光罩上的空白區和吸收層瑕疵]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_euv-blank-defect_w.jpg/_jcr_content/renditions/original.image_file.100.100.22,4,458,440.file/prove_euv-blank-defect_w.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_euv-blank-defect_w.jpg/_jcr_content/renditions/original.image_file.360.360.22,4,458,440.file/prove_euv-blank-defect_w.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_euv-blank-defect_w.jpg/_jcr_content/renditions/original.image_file.436.436.22,4,458,440.file/prove_euv-blank-defect_w.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_euv-blank-defect_w.jpg/_jcr_content/renditions/original.image_file.436.436.22,4,458,440.file/prove_euv-blank-defect_w.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_euv-blank-defect_w.jpg/_jcr_content/renditions/original.image_file.436.436.22,4,458,440.file/prove_euv-blank-defect_w.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_euv-blank-defect_w.jpg/_jcr_content/renditions/original.image_file.436.436.22,4,458,440.file/prove_euv-blank-defect_w.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove_euv-blank-defect_w.jpg/_jcr_content/renditions/original.image_file.436.436.22,4,458,440.file/prove_euv-blank-defect_w.jpg"} "定位EUV光罩上的空白區和吸收層瑕疵")
支援EUV降低瑕疵策略
定位EUV光罩上的空白區和吸收層瑕疵除了光罩對位量測，蔡司PROVE neXT也支援EUV降低瑕疵策略。該系統具備內建的高精度載台和解析能力，可精準定位EUV光罩上的空白區和吸收層瑕疵。
![蔡司半導體產品型錄]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/productrange.jpg/_jcr_content/renditions/original.image_file.100.56.0,0,1919,1080.file/productrange.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/productrange.jpg/_jcr_content/renditions/original.image_file.360.203.0,0,1919,1080.file/productrange.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/productrange.jpg/_jcr_content/renditions/original.image_file.768.432.0,0,1919,1080.file/productrange.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/productrange.jpg/_jcr_content/renditions/original.image_file.1024.576.0,0,1919,1080.file/productrange.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/productrange.jpg/_jcr_content/renditions/original.image_file.1280.720.0,0,1919,1080.file/productrange.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/productrange.jpg/_jcr_content/renditions/original.image_file.1440.810.0,0,1919,1080.file/productrange.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/productrange.jpg/_jcr_content/renditions/original.image_file.1919.1079.0,0,1919,1080.file/productrange.jpg"} "蔡司產品組合")
![蔡司半導體產品型錄]({"xsmall":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove-next-brochure-cover.jpg/_jcr_content/renditions/original.image_file.100.56.0,0,1920,1080.file/prove-next-brochure-cover.jpg","small":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove-next-brochure-cover.jpg/_jcr_content/renditions/original.image_file.360.203.0,0,1920,1080.file/prove-next-brochure-cover.jpg","medium":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove-next-brochure-cover.jpg/_jcr_content/renditions/original.image_file.768.432.0,0,1920,1080.file/prove-next-brochure-cover.jpg","large":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove-next-brochure-cover.jpg/_jcr_content/renditions/original.image_file.1024.576.0,0,1920,1080.file/prove-next-brochure-cover.jpg","xlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove-next-brochure-cover.jpg/_jcr_content/renditions/original.image_file.1280.720.0,0,1920,1080.file/prove-next-brochure-cover.jpg","xxlarge":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove-next-brochure-cover.jpg/_jcr_content/renditions/original.image_file.1440.810.0,0,1920,1080.file/prove-next-brochure-cover.jpg","max":"https://www.zeiss.com.tw/content/dam/smt/products/sms/imag/prove-next-brochure-cover.jpg/_jcr_content/renditions/original.image_file.1920.1080.0,0,1920,1080.file/prove-next-brochure-cover.jpg"} "PROVE® neXT型錄")